By Hiroshi Hosaka, Yoshitada Katagiri, Terunao Hirota, Kiyoshi Itao
Fusing advancements in optics, electronics, and mechanics, this reference systematically explores and describes an abundance of micro-optomechatronic units and functions. The authors define the ability and place regulate of a laser beam, in addition to basic rules in optical know-how. includes examples of micro-optomechatronic units in info and conversation structures
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Extra resources for Micro-optomechatronics
1554–1557. ; Kawata, S. Near Field Nanophotonics Handbook. Optronics, 1997; in Japanese. ; Itao, K. The Design method of the light and heat drive optical fiber vibrator. Journal of the Japan Society For Precision Engineering 1997, 63 (8), 1101–1106. in Japanese. I. Torsion pendulum photometer, The Rev. Sci. Instruments 1964, 35 (3), 311–313. Ashkin, A. et al. Optical levitation high vacuum. Appl. Phys. Lett. 1976, 28 (6), 333. ; Sawada, R. Optically induced rotation of dissymmetrically shaped fluorinated polyamide microobjects in optical traps.
For the case of the folded beam shown in the figure, the distortion is given by y¼ Wð2L31 þ L32 Þ : 192EIz ð18Þ Electrically Controllable Distortion. The electrostatic force generated by the comb electrodes was obtained according to Eq. (8). Since this equation is combined with Eq. (18), we can find that the micro moving Copyright © 2005 Marcel Dekker, Inc. 50 Chapter 3 Figure 6 Modeling of micro moving mirror with folded beams. (a) Schematic structure. (b) Calculation model of distorted triple-folded beam.
This enables the noncontact drive of a minute object. We explain the vibration excitation mechanism of the cantilever by the photothermal effect. When light is irradiated onto the side of a cantilever, a thermal expansion is brought out in the irradiated part by temperature Copyright © 2005 Marcel Dekker, Inc. Technological Outline of Micro-Optomechatronics 25 Figure 6 Mechanism of bending moment generation in a beam by photothermal conversion. Figure 7 Energy flow in photothermal drive. increase, as shown in Fig.